Reliability of MEMS
Brand, Oliver / Fedder, Gary K. / Hierold, Christofer / Korvink, Jan G. / Tabata, Osamu / Tsuchiya, Toshiyuki![Reliability of MEMS](https://support.digitalhusky.com/media/annotations/sorted/145/14554740/CHSBZCOP0314554740.jpg)
This edition of 'Reliability of MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, one of the most important hurdles to commercialization for microelectromechanical systems is covered in detail: the reliability of MEMS materials and devices. Due to their microscale size combined with novel functionalities, a whole new category of challenges arises, and proper determination of a given device's reliabil...