Handbook of Silicon Semiconductor Metrology
Diebold, Alain C.![Handbook of Silicon Semiconductor Metrology](https://support.digitalhusky.com/media/annotations/sorted/231/23171825/CHSBZCOP0323171825.jpg)
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose.