Analysis of Microelectronic Materials and Devices
Grasserbauer, M. (Technische University Wien, Austria) / Werner, H. W. (Philips Research Laboratories, Eindhoven, The Netherlands and Technische University Wien, Austria)
This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters. This has ensured that each technique is discussed in detail giving in-depth treatments of the subject m...