MEMS device for detection of cancer cells
Gupta, Shobha![MEMS device for detection of cancer cells](https://support.digitalhusky.com/media/annotations/sorted/455/45526079/CHSBZCOP0345526079.jpg)
MEMS, the acronym of "Micro Electro Mechanical Systems", are generally considered
as micro systems consisting of micro mechanical sensors, actuators and microelectronic circuits
integrated in a single chip. Micro means one millionth (1/1000000). A thickness of a human
hair is 100 times than that of a micron [1]. This means that it is an extremely small value
and so its fabrication needs to be taken intensive care of.
As microelectroni...