Microelectromechanical Devices
Hassan, Musaab![Microelectromechanical Devices](https://support.digitalhusky.com/media/annotations/sorted/642/6421537/CHSBZCOP036421537.jpg)
Silicon carbide (SiC) is a promising material for micro-electromechanical systems (MEMS) due to its mechanical and electrical advantages over well-known silicon MEMS. This work is part of a project sponsored by EPSRC in co-operation with Newcastle University, Edinburgh University, and the Scottish Microelectronic Centre (UK) and CWRU (USA). The book highlights relevant previous work in SiC MEMS and presents a model for SiC resonators, Fabricat...