Self-Powered and Soft Polymer MEMS/NEMS Devices
Kottapalli, Ajay Giri Prakash / Triantafyllou, Michael S. / Sengupta, Debarun / Tao, Kai
This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive. Included are chapters...