Low Frequency Noise Spectroscopy of SOI Wafers
Kushner, Vadim
The initial quality of the Silicon-On-Insulator (SOI) wafers is critical for the Low Frequency Noise (LFN) specifications. The LFN is one of the most important parameters for both the analog and the digital circuits. High silicon-buried oxide interface trap concentrations may cause excessive LFN in the circuits. The LFN spectrum can be measured only after the microchips have been manufactured. This book establishes a comprehensive method of ev...