Handbook of Chemicals and Gases for the Semiconductor Ind...
Misra, Ashutosh (Air Liquide Electronics, Inc) / Hogan, Jeremiah D. (exas Instruments, Inc) / Chorush, Russell A. (Conley, Rose and Tayon, PC)
The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing
The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Hand...