Nanofabrication: Nanolithography techniques and their app...
Perez Murano, Francesc / Martín, José Ignacio / de Teresa, José María
A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. Ideally suited for Master/PhD students who need a basic understanding of nanolithography techniques and their applications. The book also contains state-of-the-art information for researchers needing to expand their knowledge of nanofabrication.