Handbook of Semiconductor Interconnection Technology
Shwartz, Geraldine Cogin / Schwartz, Geraldine C. / Srikrishnan, Kris V.
This edition reflects the continued evolution of semiconductor technology, describing the equipment used in manufacturing for deposition and etching, such as electrochemical deposition equipment used for plating copper. It emphasizes the measurement of mechanical and thermal properties as well as the use of EELS, energy filtering TEM, and atomic force microscopy. Expert contributors explore recently reported developments in thin film liners an...