AuGe-Ni-Au based Ohmic Contacts to GaAs Structures
T. S, Abhilash / Rajaram, Guruswamy![AuGe-Ni-Au based Ohmic Contacts to GaAs Structures](https://support.digitalhusky.com/media/annotations/sorted/114/11435468/CHSBZCOP0311435468.jpg)
This book presents the magnetic, electrical and surface morphological characterization of AuGe/Ni/Au Ohmic contact metallization on GaAs/AlGaAs two-dimensional electron gas (2DEG) multilayer structures. These structures, have well known applications in infrared sources/detectors, high-speed electronic devices (HEMTs) and high sensitivity Hall effect magnetic field sensors. Deposition of AuGe/Ni/Au followed by rapid thermal anneal is a well tes...