Scanning Probe Microscopy: Characterization, Nanofabricat...
Vilarinho, Paula M. / Kingon, Angus / Rosenwaks, Yossi As the characteristic dimensions of electronic devices continue to shrink, the ability to characterize their electronic properties at the nanometer scale has come to be of outstanding importance. In this sense, Scanning Probe Microscopy (SPM) is becoming an indispensable tool, playing a key role in nanoscience and nanotechnology. SPM is opening new opportunities to measure semiconductor electronic properties with unprecedented spatial resoluti...