Dynamics of Microelectromechanical Systems
Lobontiu, Nicolae![Dynamics of Microelectromechanical Systems](https://support.digitalhusky.com/media/annotations/sorted/256/2564791/CHSBZCOP032564791.jpg)
This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.
Features of this work include:
An in-depth treatment of problems that involve reliable modeling, analysis and design,
Analytical models with correct dependences on service dimensions,
Cantilever bas...