This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters. This has ensured that each technique is discussed in detail giving in-depth treatments of the subject matter. A particularly helpful feature in this book is the concise technical summary given at the end of each section. Four major areas are considered in this volume: Bulk analysis of microelectronic materials Analysis of surfaces, interfaces and thin films Structure analysis on an atomic scale Characterization of physical, electrical and topographic features Complete with over 400 illustrations, this volume is an indispensible guide to analytical support for the microelectronic industry.