The thesis systematically investigates the factors which influence many animals’ robust adhesion abilities and micro-reversible adhesion mechanisms, including the geometric principles of their adhesion, relative humidity, surface roughness, and pre-tension. Studies exploring biological adhesion mechanisms are not only of great significance for the design of advanced adhesive materials and adhesion systems for micro-climbing robots, but also very helpful for resolving the problem of adhesion failure in MEMS/NEMS.