This book systematically discusses the intelligent scheduling problem of complex semiconductor manufacturing systems from theory to method and then to application. The main contents include data-driven scheduling framework of semiconductor manufacturing system, data preprocessing of semiconductor manufacturing system, correlation analysis of performance index of semiconductor production line, intelligent feeding control strategy, dynamic dispatching rules simulating pheromone mechanism, and load balancing dynamic scheduling of semiconductor production line, performance index-driven dynamic scheduling method of semiconductor production line, scheduling trend of semi-conductor manufacturing system in big data environment.This book aims to provide readers with valuable reference and assistance in the theoretical methods, techniques, and application cases of semiconductor manufacturing systems and their intelligent scheduling.