Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. It is an essential reference for EUV industry professionals.
Lieferbar
ISBN | 9780750326506 |
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Sprache | eng |
Cover | Fester Einband |
Verlag | Iop Publishing Ltd |
Jahr | 20211229 |
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