Feedback Control of MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated miniaturized systems. The book is organized according to the dimensional scale of the problem, starting with microscale systems and ending with atomic-scale systems. Similar to macroscale machines and processes, control systems can play a major role in improving the performance of micro- and nanoscale systems and in enabling new capabilities that would otherwise not be possible. The majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control theory and engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry. This book:Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems canDiscusses the application of control systems to problems in microelectromechanical systems, microfluidics, optical trapping, nanofabrication, and quantum dynamics, among othersCovers specific applications and the importance of controls in the use of MEMSActuators, Nanomanipulation, Micro Flow Control, and Micro-Scale Inertial SensorsFeedback Control of MEMS to Atoms is an ideal book for control systems researchers interested in pursuing new application in the micro- and nanoscale domains, and researchers developing micro- and nanosystems that are interested in learning how control systems can benefit their work.