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Handbook of Semiconductor Silicon Technology

O'Mara, William C. / Herring, Robert B. / Hunt, Lee P.

Handbook of Semiconductor Silicon Technology

A comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. It details various known properties of silicon. It includes a set of binary phase diagrams. It discusses practical aspects such as materials handling, safety, impurity and defect reduction.

CHF 259.00

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ISBN 9780815512370
Sprache eng
Cover Fester Einband
Verlag William Andrew Publishing
Jahr 19901231

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