A comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. It details various known properties of silicon. It includes a set of binary phase diagrams. It discusses practical aspects such as materials handling, safety, impurity and defect reduction.
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ISBN | 9780815512370 |
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Sprache | eng |
Cover | Fester Einband |
Verlag | William Andrew Publishing |
Jahr | 19901231 |
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