Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose.
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ISBN | 9780824705060 |
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Sprache | eng |
Cover | Fester Einband |
Verlag | Taylor and Francis |
Jahr | 20010629 |
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