A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. Ideally suited for Master/PhD students who need a basic understanding of nanolithography techniques and their applications. The book also contains state-of-the-art information for researchers needing to expand their knowledge of nanofabrication.
Lieferbar
ISBN | 9780750326063 |
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Sprache | eng |
Cover | Fester Einband |
Verlag | Iop Publ Ltd |
Jahr | 20201211 |
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